ULVAC COATING CORPORATION
- Area
- Devices & Technologies
- hall
- hall6
- Booth Location
- H015
- Products
Sensor
Others(Electronic Components & Devices, Software)
Medical & Healthcare
MEMS
MEMS package
microfluidics
microstructure parts
Exhibitor Information
ULCOAT has been developing glass based 3D micro-fabrication products, based on the defect free coating technology and fine polishing technology as a major manufacturer of the photomask blanks for semiconductor and FPD.
We provide glass microfabricated products, such as MEMS, MEMS package, Sensor parts, Glass mold, and for Life science field, Microfluidics, Microstructure devices, BIO sensors, etc,.
Advantages: High accuracy, Good uniformity and Defect free 3D micro-fabrication technology on large size substrates. Solution for Low cost high volume manufacturing.
Please visit our booth.
Contact Information
PR Contact Information
Links
- URL 1
- http://www.ulcoat.co.jp/en/product_info/glass/
Glass MEMS Products
- URL 2
- https://www.ulvac.co.jp/wiki/en/glassmems/
"Microfluidics and Micro-structure Processing on Larger-format Glass substrates for High Volume Manufacturing"(ULVAC Vacuum Magazine)
