LAZIN Co.,LTD.
Business description: Manufacture and sale of semiconductor / liquid crystal laser inspection equipment
Company policy: We will manufacture and sell highly accurate, high-speed, low-cost leather particle inspection equipment making full use of laser inspection technology, and will contribute to society in the fields of semiconductors, liquid crystal, medicine and others.
Company philosophy:
1、We value our customers, employees, as well as everyone involv ed in our business activities, first of all.
2、Creation is the soul of a company, quality is the life of a c ompany
3、Contributing to living, industry, and society at all times co nsidering the global environment.
Desktop laser inspection system
Characteristic
Inspection object: Photomask Quartz glass, Si wafer,SiC substrate, sapphire substrate.
Inspection contents: Particle, scratch, pit, bubble, crystal defect.
Inspection sensitivity: 0.1 μm PSL.
Inspection time: 200 sec (size: 150 x 150 mm)
Inspection range: 8 ~ 2inchWafer @ round, 6 ~ 2inch substrate @ square
Device size: W x D x H = 740 x 730 x 1300 mm (mainunit)
Large liquid crystal photomask defect inspection apparatus
Characteristic：
Inspection object: liquid crystal, OLED photomaskquartz glass.
Inspection contents: Particle, scratch, pit, internal bubble, defect.
Inspection sensitivity: 0.3 μm PSL.
Inspection time: 60 min (G 8: 1400 x 1220 mm)
Apparatus size: W x D x H = 2700 x 1500 x 2200 mm(main unit)
Laser scanning auto focus microscope
Characteristic：
Inspection object: Si-Wafer with pattern, Photomask.
Inspection contents: automatic image capture.
Inspection sensitivity: 1.0 μm.
Inspection time: 120 sec (size: 150 x 150 mm)
Apparatus size: W x D x H = 460 x 560 x 500 mm (main unit)
〒1200026 38-1-417 Senjuasahicho Adachi-ku,Tokyo
Engineering Department
Cho to sho
03-5284-6477
03-5284-6478
chotosyo@lazin.jp
